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3-dimensional process simulation

[NT 42944] Record Type:	[NT 1579] Language materials, printed : [NT 40817] monographic
[NT 47353] Alternative Intellectual Responsibility:	LorenzJ,
[NT 47351] Place of Publication:	New York
[NT 47263] Published:	Springer-Verlag;
[NT 47352] Year of Publication:	c1995
[NT 47264] Description:	196 p.ill. : 25 cm.;
[NT 47266] Subject:	Process control\|xComputer simulation -
[NT 50961] ISBN:	3-211-82741-2

3-dimensional process simulation
3-dimensional process simulation / J. Lorenz (ed.) - New York : Springer-Verlag, c1995. - 196 p. ; ill. ; 25 cm..
'This volume contains the Proceedings of the International'Workshop on 3D Process Simulation' which was held at the Campus of the University of Erlangen-Nuremberg in Erlangen on September 5, 1995, in conjunction with the 6th International Conference on 'Simulation of Semiconductor Devices and Processes' (SISDEP '95)'--P. v.
ISBN 3-211-82741-2
Process control|xComputer simulation

Lorenz, J

3-dimensional process simulation
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101 1 $a eng
102 $a us
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200 1 $a 3-dimensional process simulation $f J. Lorenz (ed.)
210 $a New York $d c1995 $c Springer-Verlag
215 1 $a 196 p. $c ill. $d 25 cm.
320 $a 'This volume contains the Proceedings of the International'Workshop on 3D Process Simulation' which was held at the Campus of the University of Erlangen-Nuremberg in Erlangen on September 5, 1995, in conjunction with the 6th International Conference on 'Simulation of Semiconductor Devices and Processes' (SISDEP '95)'--P. v
606 $a Process control|xComputer simulation $3 105376 $3 222062
676 $a 551.4
701 $a Lorenz $b J $3 105375
809 $d 551.4 $e L869 $p BOOK $y 1995

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